The Difference Between MIMCAP(Metal Insulator Metal Cap) and MOMCAP(Metal Oxide Metal Cap)

发布于 2015-10-17  2.9k 次阅读

According to TSMC design rule, the definition of MIM and MOM are: MIM need two different metal layers, and insulator layer is between these two layers. MOM use metal fringe cap, so MOM only require one metal layer, but has area overhead.